SOI Technology as a basis for microphotonic-microelectronic integrated devices

SOI Technology as a basis for microphotonic-microelectronic integrated devices

Author(s):

Publication title:

Science and technology of semiconductor-on-insulator structures and devices operating in a harsh environment

Title of ser.:

NATO science series. Series 2, Mathematics, physics and chemistry

Ser. no.:

185

Pub. Year:

2005

Page(from):

27

Page(to):

38

Pages:

12

Pub. info.:

Dordrecht: Kluwer Academic Publishers

ISBN:

9781402030116 [1402030118]

Language:

English

Call no.:

N17050/185

Type:

Conference Proceedings

Details

TDL ID:	ZA00014359
Series ID:	PA00000025
Conf. info. (Name):	NATO Advanced Research Workshop on Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment
Conf. info. (Number):	2004
Conf. info. (Venue):	Kiev, Ukraine
Conf. info. (Date):	2004.04.26-2004.04.30

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