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Stress Development and Relaxation in Nanostructured Films Deposited by Cathodic Vacuum Arc

Author(s):
Publication title:
Nanostructured thin films and nanodispersion strengthened coatings
Title of ser.:
NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:
155
Pub. Year:
2004
Page(from):
167
Page(to):
174
Pages:
8
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISBN:
9781402022203 [1402022204]
Language:
English
Call no.:
N17050/155
Type:
Conference Proceedings

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