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Recent Developments in Ionized Physical Vapor Deposition: Concepts, Determination of the Ionisation Efficiency and Improvement of Deposited Films

Author(s):
Bretagne, J.
Boisse-Laporte, C.
de Poucques, L.
Gousset, G.
Hugon, M.C.
Imbert, J.C.
Leroy, O.
Teule-Gay, L.
Touzeau, M.
Vasina, P.
Voldoire, O.
6 more
Publication title:
Nanostructured thin films and nanodispersion strengthened coatings
Title of ser.:
NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:
155
Pub. Year:
2004
Page(from):
113
Page(to):
122
Pages:
10
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISBN:
9781402022203 [1402022204]
Language:
English
Call no.:
N17050/155
Type:
Conference Proceedings

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