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VACUUM ARC DEPOSITED DLC-BASED COATINGS

Author(s):
Publication title:
Emerging applications of vacuum-arc-produced plasma, ion and electron beams
Title of ser.:
NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:
88
Pub. Year:
2002
Page(from):
197
Page(to):
204
Pages:
8
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISBN:
9781402010651 [1402010656]
Language:
English
Call no.:
N17050/88
Type:
Conference Proceedings

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