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Point defects in Si-SiO2 systems: current understanding

Author(s):
Publication title:
Defects in SiO[2] and related dielectrics : science and technology
Title of ser.:
NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:
2
Pub. Year:
2000
Page(from):
599
Page(to):
616
Pages:
18
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISBN:
9780792366850 [0792366859]
Language:
English
Call no.:
N17050/2
Type:
Conference Proceedings

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