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In-Line Phase and Texture Control in Microelectronics Industry

Author(s):
Kozaczek, K.  
Publication title:
Textures of materials : ICOTOM 14 : Proceedings of the 14th International Conference on Textures of Materials, held in Leuven, Belgium, July 11-15, 2005
Title of ser.:
Materials science forum
Ser. no.:
495-497(2)
Pub. Year:
2005
Page(from):
1343
Page(to):
1352
Pages:
10
Pub. info.:
Uetikon-Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499755 [087849975X]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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