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Simulation of the MOCVD Reactor for ZnO Growth

Author(s):
Liu, S. M.
Gu, S. L.
Qin, F.
Zhu, S. M.
Ye, J. D.
Liu, W.
Zhou, X.
Zhang, R.
Shi, Y.
Zheng, Y. D.
5 more
Publication title:
PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China
Title of ser.:
Materials science forum
Ser. no.:
475-479(3)
Pub. Year:
2005
Page(from):
1833
Page(to):
1836
Pages:
4
Pub. info.:
Uetikon-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499601 [0878499601]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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