Investigation on Influencing Factors of AFM Micro Probe Nanomachining
- Author(s):
- Publication title:
- Advances in Materials Manufacturing Science and Technology : selected papers from the 11th International Manufacturing Conference in China September 18th-20th, 2004, Jinan, China
- Title of ser.:
- Materials science forum
- Ser. no.:
- 471-472
- Pub. Year:
- 2004
- Page(from):
- 816
- Page(to):
- 820
- Pages:
- 5
- Pub. info.:
- Zurich: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878499564 [0878499563]
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
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