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Demonstration of Deep (80 μm) RIE Etching of SiC for MEMS and MMIC Applications

Author(s):
Sheridan, D. C.
Casady, J. B.
Ellis, E. C.
Siergiej, R. R.
Cressler, J. D.
Strong, R. M.
Urban, W. M.
Valek, W. F.
Seiler, C. F.
Buhay, H.
5 more
Publication title:
Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999
Title of ser.:
Materials science forum
Ser. no.:
338-342(2)
Pub. Year:
2000
Page(from):
1053
Page(to):
1056
Pages:
4
Pub. info.:
Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878498543 [0878498540]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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