Electrical and Structural Properties of Al and B Implanted 4H-SiC

Electrical and Structural Properties of Al and B Implanted 4H-SiC

Author(s):

Tanaka, Y.

Publication title:

Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999

Title of ser.:

Materials science forum

Ser. no.:

338-342(2)

Pub. Year:

2000

Page(from):

909

Page(to):

912

Pages:

4

Pub. info.:

Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878498543 [0878498540]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00014227
Series ID:	PA00000012
Conf. info. (Name):	International Conference on Silicon Carbide and Related Materials : ICSCRM
Conf. info. (Number):	1999
Conf. info. (Venue):	Research Triangle Park, North Carolina, USA
Conf. info. (Date):	1999.10.10-1999.10.15

Similar Items:

1 Conference Proceedings Coimplantation Effects of (C and Si)/Ga in 6H-SiC Tanaka, Y., Kobayashi, N., Hasegawa, M., Ogura, M., Ishida, Y., Yoshida, S., Okumura, H., Tanoue, H. Trans Tech Publications	7 Conference Proceedings Study of Thermal Annealing of Vacancies in Ion Implanted 3C-SiC by Positron Annihilation Ohshima,T., Uedono,A., Itoh,H., Abe,K., Suzuki,R., Ohdaira,T., Aoki,Y., Yoshikawa,M., Mikado,T., Okumura,H., Yoshida,S., … Trans Tech Publications
2 Conference Proceedings Characterization Of n-Type Layer By S+ Ion Implantation In 4H-SiC Tanaka, Yasunori, Kobayashi, Naoto, Okumura, Hajime, Yoshida, Sadafumi, Hasegawa, Masataka, Ogura, Masahiko, Tanoue, … Materials Research Society	8 Conference Proceedings Micro-Structural and Electrical Properties of Al-Implanted & Lamp-Annealed 4H-SiC Nakamura, H., Watanabe, H., Yamazaki, J., Tanaka, N., Malhan, R.K. Trans Tech Publications
3 Conference Proceedings Structural and electrical properties of beryllium implanted silicon carbide Henkel, T., Tanaka, Y., Kobayashi, N., Tanoue, H., Gong, M., Chen, X. D., Fung, S., Beling, C. D. MRS-Materials Research Society	9 Conference Proceedings Micro-Structural and Electrical Properties of Al-Implanted & Lamp-Annealed 4H-SiC Nakamura, H., Watanabe, H., Yamazaki, J., Tanaka, N., Malhan, R.K. Trans Tech Publications
4 Conference Proceedings Hot-Implantation of Phosphorus Ions into 4H-SiC Imai, S., Kobayashi, S., Shinohe, T., Fukuda, K., Tanaka, Y., Senzaki, J., Tanoue, H., Kobayashi, N., Okushi, H. Trans Tech Publications	10 Conference Proceedings Scandium and Gallium Implantation Doping of Silicon Carbide Henkel, T., Tanaka, Y., Kobayashi, N., Koutzarov, I., Okumura, H., Yoshida, S., Ohshima, T. MRS - Materials Research Society
5 Conference Proceedings The Characterization of SiC Hot-Implanted with Ga+ Tanaka,Y., Kobayashi,N., Hasegawa,M., Yoshida,S., Ishida,Y., Nishijima,T., Hayashi,N. Trans Tech Publications	11 Conference Proceedings Electrical Activation of Ion-Implanted Nitrogen and Aluminum in 4H-SiC by Excimer Laser Annealing Tanaka, Y., Tanoue, H., Arai, K. Trans Tech Publications
6 Conference Proceedings Electrical Characteristics and Surface Morphology for Arsenic Ion-Implanted 4H-SiC at High Temperature Senzaki, J., Fukuda, K., Imai, S., Tanaka, Y., Kobayashi, N., Tanoue, H., Okushi, H., Arai, K. Trans Tech Publications	12 Conference Proceedings Competitive Growth between Deposition and Etching in 4H-SiC CVD Epitaxy Using Quasi-Hot Wall Reactor Kushibe, M., Ishida, Y., Okumura, H., Takahashi, T., Masahara, K., Ohno, T., Suzuki, T., Tanaka, T., Yoshida, S., Arai, … Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12