Thin Films of a-Si1-xCx:H Deposited by PECVD: The R.F. Power and H2 Dilution Role

Thin Films of a-Si1-xCx:H Deposited by PECVD: The R.F. Power and H2 Dilution Role

Author(s):

Publication title:

Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999

Title of ser.:

Materials science forum

Ser. no.:

338-342(1)

Pub. Year:

2000

Page(from):

329

Page(to):

334

Pages:

6

Pub. info.:

Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878498543 [0878498540]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00014226
Series ID:	PA00000012
Conf. info. (Name):	International Conference on Silicon Carbide and Related Materials : ICSCRM
Conf. info. (Number):	1999
Conf. info. (Venue):	Research Triangle Park, North Carolina, USA
Conf. info. (Date):	1999.10.10-1999.10.15

Similar Items:

1 Conference Proceedings 16 R. F. Reactive Sputtered VOx Thin Films Deposited at Different Oxygen Flows Lourenco, A., Origo, F.D., Gorenstein, A., Passerini, S., Smyrl, W.H., Fantini, M.C.A., Tabacniks, M.H. Electrochemical Society	7 Conference Proceedings 6 Towards Efficient Electrochromic NiOx Films: A Study of Microstructure, Morphology and Stoichiometry of R. F. Sputtered Films Faria, I.C., Kleinke, M., Gorenstein, A., Fantini, M.C.A., Tabacniks, M.H. Electrochemical Society
2 Conference Proceedings EFFECT OF GAS PHASE HYDROGEN-DILUTION ON THE NUCLEATION, GROWTH, AND INTERFACES OF a-Si1-XCX:H Lu, Y., An, I., Gunes, M., Wakagi, M., Wronski, C.R., Collins, R.W. Materials Research Society	8 Conference Proceedings AUGER AND EELS STUDY OF a-Si1-xCx:H ALLOYS de Seta, M., Narducci, P., Evangelisti, F. Materials Research Society
3 Conference Proceedings Microstructure and Hydrogen Dynamics in a-Si1.xCx:H Dalal, V. L., Kavak, H., Mitra, S., Shinar, J., Shinar, R., Williamson, D. L. Materials Research Society	9 Conference Proceedings EVIDENCE OF QUANTUM SIZE EFFECTS IN a-Si:H/a-Si1-xCx:H SUPERLATTICES Nebel, C.E., Kessler, F., Bilger, G., Bauer, G.H., Jiang, Y.L., Hwang, H.L., Hsu, K.C., Hong, C.S. Materials Research Society
4 Conference Proceedings Carbon Rich a-Si1-xCx:H Films: An Investigation on Radiative Recombination Properties Giorgis, F., Giuliani, F., Pirri, C. F., Mandracci, P., Rava, P., Reitano, R., Calcagno, L., Musumeci, P. MRS - Materials Research Society	10 Conference Proceedings Thermal Degradation of Tantalum-Nickel Thin Film Couples Tabacniks, M. H., Kellock, A. J., Baglin, J. E. E., Coffey, K. R., Howard, J. K., Parker, M. A. MRS - Materials Research Society
5 Conference Proceedings PARALLEL CONDUCTION IN a-Si:H/a-Si1-XCX:H MULTILAYERS Bertomeu, J., Puigdollers, J., Asensi, J.M., Delgado, J.C., Andreu, J. Materials Research Society	11 Conference Proceedings ESR IN 13C ENRICHED a-Si1-XCX:H Xu, X., Kidoh, H., Morimoto, A., Kumeda, M/, Shimizu T Materials Research Society
6 Conference Proceedings Role of the RF Power on the Structure of Defects in a-Si:H Films Produced by PECVD Gordo, P.M., Subrahmanyam, V.S., Naia, M.D, Gil, C.L, de Lima, A.P., Lavareda, G., de Carvalho, C.N, Amaral, A. Trans Tech Publications	12 Conference Proceedings Conductance Transient Comparative Analysis of ECR-PECVD Deposited SiNx, SiO2/SiNx and SiOxNy Dielectric Films on Silicon Substrates Castan, H., Duenas, S., Barbolla, J., Del Prado, A., San Andres, E., Martil, I., Gonzalez-Diaz, G. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12