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Computational Modeling of Direct Print Microlithography

Author(s):
Publication title:
Materials development for direct write technologies : symposium held April 24-26, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
624
Pub. Year:
2001
Page(from):
261
Page(to):
266
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995321 [1558995323]
Language:
English
Call no.:
M23500/624
Type:
Conference Proceedings

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