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Focused Electron Beam Induced Deposition of Gold and Rhodium

Author(s):
Hoffmann, P.
Utke, I.
Cicoira, F.
Dwir, B.
Leifer, K.
Kapon, E.
Doppelt, P.
2 more
Publication title:
Materials development for direct write technologies : symposium held April 24-26, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
624
Pub. Year:
2001
Page(from):
171
Page(to):
180
Pages:
10
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995321 [1558995323]
Language:
English
Call no.:
M23500/624
Type:
Conference Proceedings

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