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Properties of Amorphous and Crystalline Ta2O5 Thin Films Prepared by Metalorganic Solution Deposition Technique for Integrated Electronic Devices

Author(s):
Publication title:
Materials science of novel oxide-based electronics : symposium held April 24-27, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
623
Pub. Year:
2000
Page(from):
383
Page(to):
388
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995314 [1558995315]
Language:
English
Call no.:
M23500/623
Type:
Conference Proceedings

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