Blank Cover Image

Volatile, Fluorine-Free β-Ketoiminate Precursors for MOCVD Growth of Lanthanide Oxide Thin Films

Author(s):
Edleman, N.L.
Belot, J.A.
Babcock, J.R.
Metz, A.W.
Metz, M.V.
Stern, C.L.
Marks, T.J.
2 more
Publication title:
Materials science of novel oxide-based electronics : symposium held April 24-27, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
623
Pub. Year:
2000
Page(from):
371
Page(to):
376
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995314 [1558995315]
Language:
English
Call no.:
M23500/623
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Development and Implementation of New Volatile Cd and Zn Precursors for the Growth of Transparent Conducting Oxide Thin Films Via MOCVD

Babcock, J.R., Wang, A., Edleman, N.L., Benson, D.D., Metz, A.W., Metz, M.V., Marks, T.J.

Materials Research Society
7 Conference Proceedings New Low-melting Cadmium Precursors for the Detailed Study of Texture Effects in MOCVD Derived CdO Thin-Films

Metz, Andrew W., Ireland, John R., Ni, Jun, Poeppelmeier, Kenneth R., Kannewurf, Carl R., Marks, Tobin J.

Materials Research Society
2 Conference Proceedings Metal-organic chemical vapor deposition of metal oxides: From precursor synthesis to thin films

Belot, J. A., Wang, A., Edleman, N. L., Babcock, J. R., Metz, M. V., Marks, T. J., Markworth, P. R., Chang, R. P. H.

MRS-Materials Research Society
8 Conference Proceedings MOCVD of ZrO2 Thin Films from Two Different β-Diketonate Precursors: Dependence of Microstructure and Growth Kinetics on the Precursor

Dharmaprakash, M.S., Shivashankar, S.A.

Electrochemical Society
3 Conference Proceedings New Transparent Conducting Oxides: Progress in Understanding Cadium- Containing Bulk and Thin-Film Materials

Asahi, R., Babcock, J.R., Edleman, N.L., Kammler, D.R., Ko, D., Lane, M.A., Metz, A.W., Wang, A., Yan, M., Chang, …

Electrochemical Society
9 Conference Proceedings Development of Improved Precursors for the MOCVD of Bismuth Titanate

Jones, A.C., Williams, P.A., Tobin, N.L., Chalker, P.R., Marshall, P., Wright, P.J., Lane, P.A., Donohue, P., Smith, …

Electrochemical Society
4 Conference Proceedings Metal-organic chemical vapor deposition of Zn-In-Sn-O and Ga-In-Sn-O transparent conducting oxide thin films

Wang, A., Edleman, N. L., Babcock, J. R., Marks, T. J., Lane, M. A., Brazis, P. W., Kannewurf, C. R.

MRS-Materials Research Society
10 Conference Proceedings Comparative theoretical study of p-ketoiminates and p-diketonates as precursors to aluminum oxide thin films

Balashov, A. M., Ermilov, A. Y., Kuzmina, N. P.

Electrochemical Society
5 Conference Proceedings MOCVD Routes to Thin Films for Superconducting Applications. Precursor Synthesis and Film Processing Issues

Marks, T. J., Belot, J. A., Hinds, B. J., Chen, J., Studebaker, D., Lei, J., Chang, R. P. H., Schindler, J. L., …

MRS - Materials Research Society
11 Conference Proceedings Development of novel Nickel(β-Diketonate)2-Ligand Complexes as Precursors for MOCVD of Nickel and Nickel Oxide

Spee, Carel I. M. A., Linden, Hans L., Mackor, Adri, Timmer, Klaas, Meinema, Harry A.

MRS - Materials Research Society
6 Conference Proceedings MOCVD Precursor Delivery Monitored and Controlled Using uv Spectroscopy

Rappoli, Brian J., DeSisto, William J., Marks, Tobin J., Belot, John A.

MRS - Materials Research Society
12 Conference Proceedings GROWTH OF BaTiO3 THIN FILMS BY MOCVD

Kaiser, Debra L., Vaudin, Mark D., Gillen, Greg, Hwang, Cheol-Seong, Robins, Lawrence H., Rotter, Lawrence D.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12