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Development and Implementation of New Volatile Cd and Zn Precursors for the Growth of Transparent Conducting Oxide Thin Films Via MOCVD

Author(s):
Babcock, J.R.
Wang, A.
Edleman, N.L.
Benson, D.D.
Metz, A.W.
Metz, M.V.
Marks, T.J.
2 more
Publication title:
Materials science of novel oxide-based electronics : symposium held April 24-27, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
623
Pub. Year:
2000
Page(from):
317
Page(to):
328
Pages:
12
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995314 [1558995315]
Language:
English
Call no.:
M23500/623
Type:
Conference Proceedings

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