Inductively Coupled High-Density Plasma-Induced Etch Damage Of GaN MESFETs
- Author(s):
Shul, Randy J. Zhang, L. Baca, A.G. Willison, Christi G. Hans, J. Pearton, S.J. Lee, K.P. Ren, F. - Publication title:
- Wide-bandgap electronic devices
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 622
- Pub. Year:
- 2001
- Page(from):
- T7.5
- Pub. info.:
- Warrendale, PA.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995307 [1558995307]
- Language:
- English
- Call no.:
- M23500/622
- Type:
- Conference Proceedings
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