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Low-Temperature Laser-Doping Process Using PSG and BSG Films for Poly-Si TFTs

Author(s):
Publication title:
Electron-emissive materials, vacuum microelectronics and flat-panel displsys : symposium held April 25-27 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
621
Pub. Year:
2001
Page(from):
Q8.4
Pub. info.:
Pittsburgh, PA.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995291 [1558995293]
Language:
English
Call no.:
M23500/621
Type:
Conference Proceedings

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