Removal Rate, Uniformity and Defectivity Studies of Chemical Mechanical Polishing of BPSG Films

Removal Rate, Uniformity and Defectivity Studies of Chemical Mechanical Polishing of BPSG Films

Author(s):

Publication title:

Chemical mechanical polishing 2000 -- fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

613

Pub. Year:

2001

Page(from):

E8.6

Pub. info.:

Warrendale, PA: Materials Research Society

ISSN:

02729172

ISBN:

9781558995215 [1558995218]

Language:

English

Call no.:

M23500/613

Type:

Conference Proceedings

Details

TDL ID:	ZA00014201
Series ID:	PA00000011
Conf. info. (Name):	Symposium on chemical mechanical polishing
Conf. info. (Number):	2000
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2000.04.26-2000.04.27

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