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Organic Solution Deposition Of Copper Seed Layers Onto Barrier Metals

Author(s):
Gu, H.
Fang, R.
O'Keefe, T.J.
O'Keefe, M.J.
Shih, W.S.
Snook, J.A.
Jeedy, K.D.
Cortez, R.
3 more
Publication title:
Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
612
Pub. Year:
2001
Page(from):
D9.19
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558995208 [155899520X]
Language:
English
Call no.:
M23500/612
Type:
Conference Proceedings

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