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Curing Study Of Hydrogen Silsesquioxane Under H2N2 Ambient

Author(s):
Donaton, R.A.
Coenegrachts, B.
Sleeckx, E.
Schaekers, M.
Sophie, G.
Matsuki, N.
Baklanov, M.R.
Struyf, H.
Lepage, M.
Vanhaelemeersch, S.
Beyer, G.
Stucchi, M.
De Roest, D.
Maex, K.
9 more
Publication title:
Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
612
Pub. Year:
2001
Page(from):
D5.12
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558995208 [155899520X]
Language:
English
Call no.:
M23500/612
Type:
Conference Proceedings

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