Synthetic Control And Properties Of Processible Poly(methylsilsesquioxane)5

Synthetic Control And Properties Of Processible Poly(methylsilsesquioxane)5

Author(s):

Lee, J.

Publication title:

Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

612

Pub. Year:

2001

Page(from):

D3.6

Pub. info.:

Warrendale, PA: Materials Research Society

ISSN:

02729172

ISBN:

9781558995208 [155899520X]

Language:

English

Call no.:

M23500/612

Type:

Conference Proceedings

Details

TDL ID:	ZA00014200
Series ID:	PA00000011
Conf. info. (Name):	Symposium on materials, technology and reliability for advanced interconnects and low-k dielectrics
Conf. info. (Number):	2000
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2000.04.23-2000.04.27

Similar Items:

1 Conference Proceedings Low Dielectric Characteristics of Nanoporous Poly [Methyl Trimethoxy Silane-Cobis (Trimethoxy Silyl) Ethane] Min, S.-K., Park, J.-M., Song, K., Kim, B.-S., Jin, M.Y., Lee, J.-K, Char, K.H., Yoon, D.Y., Rhee, H.-W. Electrochemical Society	7 Conference Proceedings Wear Properties of Bulk Amorphous Zr41.2 Ti13.8Cu12.5Ni10Be22.5 Alloys for Crystallization Lee, B. J., Song, D. H., Cho, K. M., Park, I. M., Kim, K. H., Yoon, S. Y., Cho, Y. R. Trans Tech Publications
2 Conference Proceedings Analysis of solvent effect to control the BARC coating uniformity Jung, M.-H., Yoon, S., Chung, E.-S., Yoo, B.-S., Ya, J.Y., Winning, D., Kim, B.D., Lee, H., Kim, D.Y., Kim, Y.H., Kim, … SPIE - The International Society of Optical Engineering	8 Conference Proceedings Morphological Evolution of Primary Solid Phase in Semi-Solid Slurry during the Isothermal Holding Kang, S.W., Kim, K.B., Lee, D.Y., Mun, J.H., Yoon, E.P. Trans Tech Publications
3 Conference Proceedings Influence of resin properties to resist performance at ArF lithography Yoon, S., Kim, M., Lee, H., Kim, D.Y., Kim, Y.H., Kim, B.D., Kim, J.H., Kim, K.-M., Lee, S.Y., Chon, S.-M. SPIE - The International Society of Optical Engineering	9 Conference Proceedings Effect of Pouring Temperature and Holding Time at Semi-Solid Region on the Morphology of Primary Solid Phase in Semi-Solid Slurry Kang, S.W., Kim, K.B., Lee, D.Y., Mun, J.H., Yoon, E.P. Trans Tech Publications
4 Conference Proceedings Templating Nanopores into Poly(Methylsilsesquioxane): New Low-Dielectric Coatings Suitable for Microelectronic Applications Remenar, Julius F., Hawker, Craig J., Hedrick, James L., Kim, Sung Mog, Miller, Robert D., Nguyen, Cattien, Trollsas, … MRS - Materials Research Society	10 Conference Proceedings New Poly-Si TFTs With Selectively Doped Region in the Channel Han, M-K., Jeon, J-H., Lee, M-C., Park, K-C., Yoo, J-S., Yoon, C-E. Materials Research Society
5 Conference Proceedings Deposition of Poly-Si by Remote Plasma CVD with Si2H6-SiF4 Rhee, S.-W., Lee, I.-J., Kim, D.-H. American Institute of Chemical Engineers	11 Conference Proceedings Scanning Rapid Thermal Annealing Process for Low Temperature Poly-Silicon Thin Film Transistors Kim, F.-K., Kim, G.-B., Yoon, Y-G., Kim, C.-H., Lee, B.-I., Joo, S.-K. Electrochemical Society
6 Conference Proceedings Structure-Property Relationships for Nano-porous Poly (Methyl-Silsesquioxane) Films with Low Dielectric Constants Prepared via Organ icflnorganic Polymer … Nguyen, C.V., Hawker, C.J., Hedrick, J.L., Jaffe, R.L., Miller, R.D., Remenar, J.F., Rhee, H.W., Toney, M.F., Trollsas, … Electrochemical Society	12 Conference Proceedings Properties of Cement Paste Using Mine Tailing and Polymer Materials K.N. Kim, J.H. Kim, D.Y. Shin, B.G. Lee, H. Park Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12