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Quantitative Depth Profiles Of Vacancy Cluster Defects Produced By MeV Ion Implantation In Si: Species And Dose Dependence

Author(s):
Chen, Claudine M.
Rassiga, Stefano
Weber, Marc H.
Petkov, Mihail P.
Lynn, Kelvin G.
Atwater, Harry A.
1 more
Publication title:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
610
Pub. Year:
2001
Page(from):
B9.4
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558995185 [1558995188]
Language:
English
Call no.:
M23500/610
Type:
Conference Proceedings

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