Blank Cover Image

Reaction of Excess Silicon Interstitials in the Presence of Arsenic and Germanium

Author(s):
Brindos, R.
Keys, P.H.
Griglione, M.
Jones, K. S.
Law, M. E.
Agarwal, Aditya
Andideh, Ebrahim
2 more
Publication title:
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
610
Pub. Year:
2001
Page(from):
B8.4
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558995185 [1558995188]
Language:
English
Call no.:
M23500/610
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Influence of Arsenic Clustering and Precipitation on the Interstitial and Vacancy Concentration in Silicon

Brindos, R., Clark, M.H., Jones, K.S., Griglione, M., Gossmann, Hans-J., Agarwal, A., Murto, B., Andideh, E.

Materials Research Society
7 Conference Proceedings The Role of Ion Mass on End-of-Range Damage in Shallow Preamorphizing Silicon

Clark, Mark H., Jones, Kevin S., Haynes, Tony E., Barbour, Charles J., Minor, Kenneth G., Andideh, Ebrahim

Materials Research Society
2 Conference Proceedings Arsenic Trapping and its Effect on Enhanced Diffusion

Brindos, R., Law, M. E., Jones, K. S., Andideh, E.

MRS - Materials Research Society
8 Conference Proceedings Exploring Alternative Annealing Methods for Shallow Junction Formation in Ion Implanted Silicon

Jones, K.S., Banisaukis, H., Earles, S., Lindfors, C., Griglione, M., Law, M.E., Taiwar, S., Falk, S.W., Downey, D.F., …

Electrochemical Society
3 Conference Proceedings Phosphorus / Silicon Interstitial Annealing After Ion Implantation

Keys, P. H., Brindos, R., Krishnamoorthy, V., Puga-Lambers, M., Jones, K. S., Law, Mark E.

Materials Research Society
9 Conference Proceedings The Role of Vacancies and Interstitials in Transient-Enhanced Diffusion of Arsenic Implanted Into Silicon

Venables, D., Krishnamoorthy, V., Gossmann, H-J., Lilak, A., Jones, K. S., Jacobson, D. C.

MRS - Materials Research Society
4 Conference Proceedings Effect of Arsenic on Extended Defect Evolution in Silicon

Brindos, R., Jones, K.S., Law, M.E

Materials Research Society
10 Conference Proceedings An Investigation of Vacancy Population During Arsenic Activation in Silicon

Dokumaci, O., Gossmann, H-J., Jones, K. S., Law, M. E.

MRS - Materials Research Society
5 Conference Proceedings The hydrogen-saturated self-interstitial iu silicon and germanium

Budde,M., Nielsen,B.Bech, Leary,P., Goss,J., Jones,R., Briddon,P.R., Oberg,S., Breuer,S.J.

Trans Tech Publications
11 Conference Proceedings Modeling of Dopant Defect Interactions

Camarce, C., Radic, L., Keys, P., Brindos, R, Jones, K.S., Law, M.E.

Materials Research Society
6 Conference Proceedings Interstitial Defect Reactions in Silicon

Zhao, S., Agarwal, A. M., Benton, J. L., Gilmer, G. H., Kimerling, L. C.

MRS - Materials Research Society
12 Conference Proceedings Effects of Arsenic Deactivation on Arsenic-Implant Induced Enhanced Diffusion in Silicon

Dokumaci, O., Law, M. E., Krishnamoorthy, V., Jones, K. S.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12