Isotope Exchange In Hydrogenated Silicon-Oxynitride (SiON) For 1.55 μm Optical Waveguide Applications
- Author(s):
- Publication title:
- Amorphous and heterogeneous silicon thin films - 2000 : symposium held April 24-28, 2000, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 609
- Pub. Year:
- 2001
- Page(from):
- A26.8
- Pub. info.:
- Warrendale: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995178 [155899517X]
- Language:
- English
- Call no.:
- M23500/609
- Type:
- Conference Proceedings
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