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AFM And HREM Observation Of The Pulse Laser Interference Crystallized a-Si:H/a-SiNx:H Multilayers

Author(s):
Chen, K.
Fung, Y. M.
Huang, X.
Li, J.
Li, Q.
Li, W.
Liu, Z.
Wang, L.
Wang, M.
Xu, J.
Xu, J. B.
Yin, X.
Zhu, J.
8 more
Publication title:
Amorphous and heterogeneous silicon thin films - 2000 : symposium held April 24-28, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
609
Pub. Year:
2001
Page(from):
A25.1
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558995178 [155899517X]
Language:
English
Call no.:
M23500/609
Type:
Conference Proceedings

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