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Crystalline Si Films Grown Epitaxially At Low Temperatures By ECR-PECVD

Author(s):
Christiansen, S.
Fuhs, W.
Nerding, M.
Platen, J.
Schmidbauer, M.
Selle, B.
1 more
Publication title:
Amorphous and heterogeneous silicon thin films - 2000 : symposium held April 24-28, 2000, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
609
Pub. Year:
2001
Page(from):
A8.6
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558995178 [155899517X]
Language:
English
Call no.:
M23500/609
Type:
Conference Proceedings

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