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Tribological Experiments Applied to Tungsten Chemical- Mechanical Polishing

Author(s):
Agarwal, P.
Bielmann, M.
Lolt, D.
Mahajan, U.
Mischler, S.
Rosset, E.
Singh, R. K.
2 more
Publication title:
Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
566
Pub. Year:
2000
Page(from):
97
Page(to):
102
Pages:
6
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558994737 [1558994734]
Language:
English
Call no.:
M23500/566
Type:
Conference Proceedings

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