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Mechanisms for Microstructure Evolution in Electroplated Copper Thin Films

Author(s):
Cabral, C.
Gignac, L.
Harper, J. N. E.
Hu, C. K.
Noyan, I. C.
ricacos, P. C.
Rodbell, K. P.
2 more
Publication title:
Polycrystalline metal and magnetic thin films : symposium held April 5-8, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
562
Pub. Year:
1999
Page(from):
223
Page(to):
228
Pages:
6
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558994690 [1558994696]
Language:
English
Call no.:
M23500/562
Type:
Conference Proceedings

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