Growth and Structure of Metallic Barrier Layers and Interconnect Films II: Atomistic Simulations of Film Deposition Onto Inclined Surfaces
- Author(s):
Baumann, F. H. DallaTorre, J. DiazdelaRubia, T. DjafariRouhani, M. Gilmer, G. H. Huang, H. Kalyanaraman, R. Windt, D. L. - Publication title:
- Polycrystalline metal and magnetic thin films : symposium held April 5-8, 1999, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 562
- Pub. Year:
- 1999
- Page(from):
- 129
- Page(to):
- 134
- Pages:
- 6
- Pub. info.:
- Warrendale, PA: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994690 [1558994696]
- Language:
- English
- Call no.:
- M23500/562
- Type:
- Conference Proceedings
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