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Growth and Structure of Metallic Barrier Layers and Interconnect Films II: Atomistic Simulations of Film Deposition Onto Inclined Surfaces

Author(s):
Baumann, F. H.
DallaTorre, J.
DiazdelaRubia, T.
DjafariRouhani, M.
Gilmer, G. H.
Huang, H.
Kalyanaraman, R.
Windt, D. L.
3 more
Publication title:
Polycrystalline metal and magnetic thin films : symposium held April 5-8, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
562
Pub. Year:
1999
Page(from):
129
Page(to):
134
Pages:
6
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558994690 [1558994696]
Language:
English
Call no.:
M23500/562
Type:
Conference Proceedings

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