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Investigation of the Role of Chemical-Mechanical Polishing in Improving the Performance of Polysilicon TFTs

Author(s):
Armstrong, B. M.
Baine, P. T.
Gamble, H. S.
Lee, B.
Mitchell, S. J. N.
Quinn, L. J.
1 more
Publication title:
Flat-panel displays and sensors - principles, materials and processes : symposium held April 4-9, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
558
Pub. Year:
2000
Page(from):
257
Page(to):
262
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558994652 [1558994653]
Language:
English
Call no.:
M23500/558
Type:
Conference Proceedings

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