Investigation of the Role of Chemical-Mechanical Polishing in Improving the Performance of Polysilicon TFTs
- Author(s):
Armstrong, B. M. Baine, P. T. Gamble, H. S. Lee, B. Mitchell, S. J. N. Quinn, L. J. - Publication title:
- Flat-panel displays and sensors - principles, materials and processes : symposium held April 4-9, 1999, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 558
- Pub. Year:
- 2000
- Page(from):
- 257
- Page(to):
- 262
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994652 [1558994653]
- Language:
- English
- Call no.:
- M23500/558
- Type:
- Conference Proceedings
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