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Optical Filter for Fabricating Self-Aligned Amorphous Si TFTs

Author(s):
Boyce, J. B.
Chua, C.
Ho, J.
Lu, J. P.
Mei, P.
Wang, Y.
1 more
Publication title:
Amorphous and heterogeneous silicon thin films : fundamentals to devices - 1999 : symposium held April 5-9, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
557
Pub. Year:
1999
Page(from):
677
Page(to):
682
Pages:
6
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558994645 [1558994645]
Language:
English
Call no.:
M23500/557
Type:
Conference Proceedings

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