Stress in Hydrogenated Microcrystalline Silicon Thin Films

Stress in Hydrogenated Microcrystalline Silicon Thin Films

Author(s):

Bertomeu, J.

Publication title:

Amorphous and heterogeneous silicon thin films : fundamentals to devices - 1999 : symposium held April 5-9, 1999, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

557

Pub. Year:

1999

Page(from):

537

Page(to):

542

Pages:

6

Pub. info.:

Warrendale: Materials Research Society

ISSN:

02729172

ISBN:

9781558994645 [1558994645]

Language:

English

Call no.:

M23500/557

Type:

Conference Proceedings

Details

TDL ID:	ZA00014188
Series ID:	PA00000011
Conf. info. (Name):	Symposium on amorphous and heterogeneous silicon thin films
Conf. info. (Number):	1999
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1999.04.05-1999.04.09

Similar Items:

1 Conference Proceedings PROPERTIES AND APPLICATION OF UNDOPED HYDROGENATED MICROCRYSTALLINE SILICON THIN FILMS Kanichi, J., Hasan, E., Kotecki, D. F., takamaori,. T., Griffith, J. H. Materials Research Society	7 Conference Proceedings Anisotropy In Hydrogenated Silicon Thin Films Gedvilas, L. M., Mahan, A. H., Nelson, B. P., Perkins, J. D., Reedy, R., Theisen, J., Webb, J. D. Materials Research Society
2 Conference Proceedings Properties of Amorphous Silicon Thin-Film Transistors with Phosphorous-Doped Hydrogenated Microcrystalline Silicon Choi, J. H., Kim, C. W., Yang, H. G., Souk, J. H. MRS - Materials Research Society	8 Conference Proceedings Transport Path In Hydrogenated Microcrystalline Silicon Wyrsch, N., Droz, C., Feitknecht, L., Spitznagel, J., Shah, A. Materials Research Society
3 Conference Proceedings Fabrication of hydrogenated microcrystalline silicon thin films using RF magnetron sputtering H.-W. Wang, W.-N. Su, C.-W. Han, S.-H. Chen, C.-C. Lee Society of Photo-optical Instrumentation Engineers	9 Conference Proceedings Optical stability of small-molecule thin-films determined by Photothermal Deflection Spectroscopy Monica Beatriz Della Pirriera, Marco Stella, Joaquim Puigdollers, Joan Bertomeu, Cristobal Voz, Jordi Andreu, Ramon … Materials Research Society
4 Conference Proceedings Thin film transistors made from hydrogenated microcrystalline silicon Wang, K. C., Chen, B. Y., Hsu, K. C., Yew, T. R., Hwang, H. L. MRS - Materials Research Society	10 Conference Proceedings STRUCTURE CHARACTERISTICS, AND THE APPLICATION OF PHOSPHORUS DOPED HYDROGENATED MICROCRYSTALLINE SILICON Jeng, S.J., Kotecki, D.E., Kanicki, J., Parks, C.C., Tien, J. Materials Research Society
5 Conference Proceedings PROPERTIES OF HIGH CONDUCTIVITY PHOSPHOROUS DOPED HYDROGENATED MICROCRYSTALLINE SILICON AND APPLICATION IN THIN FILM TRANSISTOR TECHNOLOGY Kanichi, J., Hasan, E., Griffith, J. H., Takamori, T., Tsang, J. C. Materials Research Society	11 Conference Proceedings Wide-spectral-response photodetectors based on microcrystalline hydrogenated silicon thin films Vieira,M., Fantoni,A., Koynov,S., Schwarz,R. SPIE-The International Society for Optical Engineering
6 Conference Proceedings A SAXS Study of Hydrogenated Nanocrystalline Silicon Thin Films K.G. Kiriluk, D.L. Williamson, D.C. Bobela, C. Taylor, B. Yan, J. Yang, S. Guha, A. Madan, F. Zhu Materials Research Society	12 Conference Proceedings Hydrogenated Microcrystalline Silicon: From Material To Solar Cells Droz, C., Feitknecht, L., Goerlitzer, M., Kroll, U., Meier, J., Shah, A., Torres, P., Vallat-Sauvain, E., Vanecek, M., … Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12