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Low Hydrogen Content, High-Quality Hydrogenated Amorphous Silicon Grown by Hot-Wire CVD

Author(s):
Crall, R. S.
Gao, W.
Iwaniczko, E.
Mahan, A. H.
Nelson, B. P.
Wang, Q.
Xu, Y.
2 more
Publication title:
Amorphous and heterogeneous silicon thin films : fundamentals to devices - 1999 : symposium held April 5-9, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
557
Pub. Year:
1999
Page(from):
97
Page(to):
104
Pages:
8
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558994645 [1558994645]
Language:
English
Call no.:
M23500/557
Type:
Conference Proceedings

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