Blank Cover Image

Structural and Optoelectronic Properties of Amorphous and Microcrystalline Silicon Deposited by Low Substrate Temperatures by RF and HW CVD

Author(s):
Publication title:
Amorphous and heterogeneous silicon thin films : fundamentals to devices - 1999 : symposium held April 5-9, 1999, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
557
Pub. Year:
1999
Page(from):
91
Page(to):
96
Pages:
6
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558994645 [1558994645]
Language:
English
Call no.:
M23500/557
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Doping Of Amorphous And Microcrystalline Silicon Films By Hot-Wire CVD And RF-PECVD At Low Substrate Temperatures On Plastic Substrates

Alpuim, P., Chu, V., Conde, J. P.

Materials Research Society
7 Conference Proceedings Amorphous-to-Microcrystalline Silicon Transition in Hot-Wire Chemical Vapor Deposition

Brogueira, P., Chu, V., Conde, J. P.

MRS - Materials Research Society
2 Conference Proceedings Piezoresistive Sensors on Plastic Substrates Using Doped Microcrystalline Silicon

Alpuim, P., Chu, V., Conde, J.P.

Materials Research Society
8 Conference Proceedings Post-Deposition Annealing and Hydrogenation of Hot-Wire Amorphous and Microcrystalline Silicon Films

Conde, J. P., Brogueira, P., Chu, V.

MRS - Materials Research Society
3 Conference Proceedings Low Temperature Thin-Film Microelectromechanical Devices On Plastic Substrates

Alpuim, P., Boucinha, M., Brogueira, P., Chu, V., Conde, J. P.

Materials Research Society
9 Conference Proceedings Optoelectronic Properties of High-Gap Amorphous Silicon-Carbon Alloys

Chu, V., Conde, J. P., Brogueira, P., Micaelo, P., Jarego, J. P., Silva, M. F. da, Soares, J. C.

MRS - Materials Research Society
4 Conference Proceedings The Influence of Hydrogen Dilution and Substrate Temperature in Hot-Wire Deposition of Amorphous and Microcrystalline Silicon with Filament Temperatures Between …

Conde, J. P., Brogueira, P., Castanha, R., Chu, V.

MRS - Materials Research Society
10 Conference Proceedings Optoelectronic Detection of DNA Molecules Using an Amorphous Silicon Photodetector

Fixe, F., Prazeres, D. M. F., Chu, V., Conde, J. P.

Materials Research Society
5 Conference Proceedings Electromechanical Properties of Amorphous and Microcrystalline Silicon Micromachined Structures

Gaspar, J., Boucinha, M., Chu, V., Conde, J.P.

Materials Research Society
11 Conference Proceedings Thin-Film Transistors On Pet At 100 CircC

Conde, J.P., Alpuim, P., Chu, V.

Materials Research Society
6 Conference Proceedings Amorphous Silicon-Carbon Alloys Deposited by Electron-Cyclotron Resonance PECVD

Chu, V., Conde, J. P.

MRS - Materials Research Society
12 Conference Proceedings Thin Film Amorphous Silicon Bulk-Mode Disk Resonators Fabricated on Glass Substrates

A. Gualdino, V. Chu, J.P. Conde

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12