Blank Cover Image

Reliability and Properties of PZT Thin Films for MEMS Applications

Author(s):
Publication title:
Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
546
Pub. Year:
1999
Page(from):
153
Page(to):
158
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558994522 [1558994521]
Language:
English
Call no.:
M23500/546
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Relationships Between Microstructure and Reliability in PZT MEMS

Olson, B.W., Randall, L.M., Richards, C.D., Richards, R.F., Bahr, D.F.

Materials Research Society
7 Conference Proceedings Residual Stress Control to Optimize PZT MEMS Performance

Kennedy, M.S., Bahr, D.F., Richards, C.D., Richards, R.F.

Materials Research Society
2 Conference Proceedings Mechanical properties and adhesion of PZT thin films for MEMS

Jungk, J. M., Crozier, B. T., Bandyopadhyay, A., Moody, N. R., Bahr, D. F.

MRS-Materials Research Society
8 Conference Proceedings Optimization Of Thermal Processing And Chemistry In The Fabrication Of A PZT Based MEMS Power Generator

Olson, B.W., Skinner, J.L., Richards, C.D., Richards, R.F., Bahr, D.F.

Materials Research Society
3 Conference Proceedings Fracture Behavior of Thin Film PZT on Silicon MEMS and Membranes

Olson, A.L., Skinner, J.L., Bahr, D.F., Richards, C.D., Richards, R.F.

Materials Research Society
9 Conference Proceedings PZT And Electrode Enhancements Of MEMS Based Micro Heat Engine For Power Generation

Olson, A.L., Eakins, L.M., Olson, B.W., Bahr, D.F., Richards, C.D., Richards, R.F.

Materials Research Society
4 Conference Proceedings Influence of Structure and Chemistry on Piezoelectric Properties of PZT in a MEMS Power Generation Application

Eakins, L.M.R., Eakins, D.E., Richards, C.D., Norton, M.G., Richards, R.F., Bahr, D.F.

Materials Research Society
10 Conference Proceedings SCALING PROPERTIES IN THE ELECTRICAL AND RELIABILITY CHARACTERISTICS OF LEAD-ZIRCONATE-TITANATE (PZT) FERROELECTRIC THIN FILM CAPACITORS

Sudhama, C., Carrano, J.C., Parker, L.H., Chikarmane, V., Lee, J.C., Tasch, A.F., Miller, W., Abt, N., Shepherd, W.H.

Materials Research Society
5 Conference Proceedings Phase Transformations in Sol-Gel PZT Thin Films

Eakin, D.P., Norton, M.G., Bahr, D.F.

Materials Research Society
11 Conference Proceedings Thin Film Fracture During Nanoindentation of Hard Film-Soft Substrate Systems

Pang, M., Weaver, K.D., Bahr, D.F.

Materials Research Society
6 Conference Proceedings Defects and Failure Modes In PZT Films For A MEMS Microengine

Bahr, D.F, Crozier, B.T., Richards, C.D., Richards, R.F.

Materials Research Society
12 Conference Proceedings PROPERTIES OF PIEZOELECTRIC PZT THIN FILMS FOR MICROACTUATOR APPLICATIONS

Damjanovic, D., Brooks, K. G., Kholkin, A., Kohli, M., Maeder, T., Muralt, P., Setter, N.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12