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Conformal Electroless Copper and Nickel Deposition on MEMS Structures

Author(s):
Adams, S.G.
Kudrle, T.D.
MacDonald, N.C.
Neves, H.P.
Chen, J-M.
Lopatin, S.
Maharbiz, M.
2 more
Publication title:
Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
546
Pub. Year:
1999
Page(from):
139
Page(to):
144
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558994522 [1558994521]
Language:
English
Call no.:
M23500/546
Type:
Conference Proceedings

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