Characterization of Novel Metal/AIN/Si Thin Film Structures as Hydrogen Sensor

Characterization of Novel Metal/AIN/Si Thin Film Structures as Hydrogen Sensor

Author(s):

Mo, Wenjun

McCuIlen, Erik E

Prakasam, Haripnya E.

Publication title:

AIChE, sensor technology, conference proceedings : AIChE annual meeting, November 3-8, 2002, Indianapolis, Indiana

Title of ser.:

AIChE Conference Proceedings

Ser. no.:

P-172

Pub. Year:

2002

Page(from):

40

Page(to):

47

Pages:

8

Pub. info.:

New York: American Institute of Chemical Engineers

ISBN:

9780816908912 [0816908915]

Language:

English

Call no.:

A07755/200205

Type:

Conference Proceedings

Details

TDL ID:	ZA00014151
Series ID:	PA00000008
Conf. info. (Name):	AIChE Annual Meeting
Conf. info. (Number):	2002
Conf. info. (Venue):	Indianapolis, IN, USA
Conf. info. (Date):	2002.11.03-2002.11.08

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