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Real-Time Feedback Control of Reactive Ion Etching of Amorphous Silicon for Thin Film Transistor Fabrication

Author(s):
Herman, J.S.
Benson, T.E.
Patterson, O.D.
Chen, C.Y.
Demos, A.T.
Khargonekar, P.P.
Terry, F.L., Jr.
Elta, M.E.
3 more
Publication title:
Proceedings of the Second Symposium on Thin Film Transistor Technologies
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-35
Pub. Year:
1994
Page(from):
68
Page(to):
76
Pages:
9
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770941 [1566770947]
Language:
English
Call no.:
E23400/950720
Type:
Conference Proceedings

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