In situ Process Monitoring of the Conversion of Al-Ge-Ni Contacts From Schottky to Ohmic Electrical Behavior

In situ Process Monitoring of the Conversion of Al-Ge-Ni Contacts From Schottky to Ohmic Electrical Behavior

Author(s):

Publication title:

Proceedings of the Twenty-first State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXI)

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

1994-34

Pub. Year:

1994

Page(from):

175

Page(to):

186

Pages:

12

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566770934 [1566770939]

Language:

English

Call no.:

E23400/950719

Type:

Conference Proceedings

Details

TDL ID:	ZA00014143
Series ID:	PA00000028
Conf. info. (Name):	State-of-the-Art Program on Compound Semiconductors - SOTAPOCS ; Meeting of the Electrochemical Society
Conf. info. (Number):	21st ; 186th
Conf. info. (Venue):	Miami Beach, FL, USA
Conf. info. (Date):	1994.10.09-1994.10.14

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