The Measurement of Submicron Epitaxial Layer Thickness and Free Carrier Concentration by Infrared Reflectance Spectroscopy

The Measurement of Submicron Epitaxial Layer Thickness and Free Carrier Concentration by Infrared Reflectance Spectroscopy

Author(s):

Fowler, B.W.

Publication title:

Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

1994-33

Pub. Year:

1994

Page(from):

254

Page(to):

265

Pages:

12

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566770927 [1566770920]

Language:

English

Call no.:

E23400/951106

Type:

Conference Proceedings

Details

TDL ID:	ZA00014142
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Diagnostic Techniques for Semiconductor Materials and Devices ; Electrochemical Society Meeting
Conf. info. (Number):	3rd ; 1994
Conf. info. (Venue):	Miami Beach, FL, USA
Conf. info. (Date):	1994.10.10-1994.10.12

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