The Development and Performance of an Electrostatic Chuck for Silicon Etches
- Author(s):
- Publication title:
- Proceedings of the tenth symposium on plasma processing
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 1994-20
- Pub. Year:
- 1994
- Page(from):
- 291
- Page(to):
- 299
- Pages:
- 9
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770774 [1566770777]
- Language:
- English
- Call no.:
- E23400/941901
- Type:
- Conference Proceedings
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