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Characterization of Etched Silicon Membranes

Author(s):
Publication title:
Proceedings of the Symposium on Microstructures and Microfabricated Systems
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-14
Pub. Year:
1994
Page(from):
148
Page(to):
163
Pages:
16
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770460 [1566770467]
Language:
English
Call no.:
E23400/941398
Type:
Conference Proceedings

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