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CONTROLLING THE OXYGEN PRECIPITATION IN NON-EPI WAFERS TO PREVENT CHARGE LEAKAGE FROM DRAM TRENCH CAPACITORS

Author(s):
Stephens, A.E.  
Publication title:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-10
Pub. Year:
1994
Page(from):
908
Page(to):
919
Pages:
12
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770422 [1566770424]
Language:
English
Call no.:
E23400/941387
Type:
Conference Proceedings

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