GETTERING PHENOMENA IN EPITAXIAL SILICON STRUCTURES
- Author(s):
- Kirscht, F.G.
- Publication title:
- Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 1994-10
- Pub. Year:
- 1994
- Page(from):
- 831
- Page(to):
- 843
- Pages:
- 13
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770422 [1566770424]
- Language:
- English
- Call no.:
- E23400/941387
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Competitive gettering of Fe, Ni and Cu in silicon wafers by polysilicon backside and internal gettering
Electrochemical Society |
Electrochemical Society |
2
Conference Proceedings
Effect of Dopants and Oxygen Precipitation on Low-Temperature Out-Diffusion and Gettering of Cu in Silicon Wafer
Electrochemical Society |
Electrochemical Society |
MRS - Materials Research Society |
Electrochemical Society |
Trans Tech Publications |
Materials Research Society |
5
Conference Proceedings
Sample preparation impact on metal contamination evaluated by surface photovoltage and photoconductance decay
Electrochemical Society |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
*GETTERING AND GETTERING STABILITY OF METALS AT OXIDE PARTICLES IN SILICON
Materials Research Society |