ON THE USE OF QUADROPOLE SIMS FOR THE MEASUREMENT OF SURFACE METALLIC CONTAMINATION

ON THE USE OF QUADROPOLE SIMS FOR THE MEASUREMENT OF SURFACE METALLIC CONTAMINATION

Author(s):: Frost, M.R.
Publication title:: Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III
Title of ser.:: Electrochemical Society Proceedings Series
Ser. no.:: 1994-9
Pub. Year:: 1994
Page(from):: 339
Page(to):: 350
Pages:: 12
Pub. info.:: Pennington, NJ: Electrochemical Society
ISSN:: 01616374
ISBN:: 9781566770415 [1566770416]
Language:: English
Call no.:: E23400/941386
Type:: Conference Proceedings

Details

TDL ID:	ZA00014118
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing
Conf. info. (Number):	3rd
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1994.05.23-1994.05.27

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