Blank Cover Image

MONITORING AND OPTIMIZATION OF SILICON SURFACE QUALITY

Author(s):
Publication title:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-7
Pub. Year:
1994
Page(from):
505
Page(to):
513
Pages:
9
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770385 [1566770386]
Language:
English
Call no.:
E23400/941397
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings High Sensitivity Detection of Silicon Surface Reactions by Photoconductance Decay

Norga,G.J., Black,M.R., Black,K.A., M'Saad,H., Michel,J., Kimerling,L.C.

Trans Tech Publications
7 Conference Proceedings Defect Engineering for Silicon Microphotonics

Agarwal, A., Foresi, J.S., Giovane, L.M., Liao, L., Michel, J., Wada, K., Kimerling, L.C.

Electrochemical Society
2 Conference Proceedings In-situ wafer contamination detection through rf-PCD measurements

Michel,J., Black,M.R., Norga,G.J., Black,K.A., M'saad,H., Kimerling,L.C.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Iron in p-type silicon:A comprehensive model.(Invited)

Zhao,S., Smith,A.L., Ahn,S.H., Norga,G.J., Platero,M.T., Nakashima,H., Assali,L.V.C., Michel,J., Kimerling,L.C.

Trans Tech Publications
3 Conference Proceedings Silicon surface defects:the roles of passivation and surface contamination

Reddy,A.J., Burr,T.A., Chan,J.K., Norga,G.J., Michel,J., Kimerling,L.C.

Trans Tech Publications
9 Conference Proceedings In Situ Monitoring of HF Reprocessing in an Industrial Scale Recirculator Bath

Reddy, A. J., Norga, G. J., Park, A. S., Smith, A. L., Michel, J., Kimerling, L. C., Parekh, B., Shyu, J-H., Deane, E.

MRS - Materials Research Society
4 Conference Proceedings In-Situ Determination of Si Wafer Contamination Using Photoconductance Decay Measurements*

Michel,J., Reddy,A.J., Norga,G.J., Platero,M., Kimerling,L.C.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Electrical study of crystalline silicon coimplanted with erbium and oxygen

Ahn,S.H., Palm,J., Zheng,B., Duan,X., Agarwal,A.M., Nelson,S.F., Michel,J., Kimerling,L.C.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings In-Situ Determination of Si Wafer Contamination Using Photoconductance Decay Measurements

Michel, J., Reddy, A.J., Norga, G.J., Platero, M., Kimerling, L.C.

Electrochemical Society
11 Conference Proceedings Stress Modulation of PECVD Silicon Nitride

M. Balseanu, L. Q. Xia, V. Zubkov, M. Le, J. Lee, H. M'Saad

Electrochemical Society
6 Conference Proceedings ERBIUM-DOPED SILICON FOR INTEGRATED OPTICAL INTERCONNECTS

Kimerling, L.C., Koker, D.M., Zheng, B., Ren, F.Y.G., Michel, J.

Electrochemical Society
12 Conference Proceedings Silicon for photonics

Kimerling,L.C.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12