Blank Cover Image

REDUCTION OF SURFACE ROUGHENING AND SUBSURFACE DEFECTS IN H-PLASMA CLEANING OF Si (100)

Author(s):
Schneider, T.P.
Montgomery, J.S.
Ying, H.
Barnak, J.P.
Chen, Y.L.
Maher, D.M.
Nemanich, R.J.
2 more
Publication title:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-7
Pub. Year:
1994
Page(from):
329
Page(to):
338
Pages:
10
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770385 [1566770386]
Language:
English
Call no.:
E23400/941397
Type:
Conference Proceedings

Similar Items:

Schneider, T.P., Bernhard, B.L., Chen, Y.L., Nemanich, R.J.

Materials Research Society

Schneider, T.P., Cho, J., Vander Weide, J., Wells, S.E., Lucovsky, G, Nemanich, R.J., Mantini, M.J., Rudder, R.A., …

Materials Research Society

Cho, Jaewon, Schneider, T.P., Nemanich, R.J.

Materials Research Society

Schneider, T.P., Aldrich, D.A., Cho, J., Nemanich, R.J.

Materials Research Society

Schneider, T. P., Cho, J., Chen, Y. L., Maher, D. M., Nemanich, R. J.

MRS - Materials Research Society

Montgomery, J. S., Barnak, J. P., Silvestre, C., Hauser, J. R., Nemanich, R. J.

MRS - Materials Research Society

Liu, H. X., Schneider, T. P., Montgomery, J., Chen, Y. L., Buczkowski, A., Shimura, F., Nemanich, R. J., Maher, D. M., …

MRS - Materials Research Society

Barnak, J. P., King, S., Montgomery, J., Ku, Ja-Hum, Nemanich, R. J.

MRS - Materials Research Society

Barnak, J. P., Ying, H., Chen, Y. L., Montgomery, J., Nemanich, R. J.

MRS - Materials Research Society

Ying, Hong, Barnak, J. P., Chen, Y. L., Nemanich, R. J.

MRS - Materials Research Society

Montgomery, J.S., Barnak, J.P., Bayoumi, A., Hauser, J.R., Nemanich, R.J.

Electrochemical Society

Yasuda, T., Ma, Y., Habermehl, S., Kim, S.S., Lucovsky, G., Schneider, T.P., Cho, J., Nemanich R.J.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12