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CHEMICAL VAPOR CLEANING TECHNOLOGiES FOR DRY PROCESSING IN SEMICONDUCTOR MANUFACTURING

Author(s):
Beck, S.E.
Bohling, D.A.
Felker, B.S.
George, M.A.
Gilicinski, A.G.
Ivankovits, J.V.
Langan, J.G.
Rynders, S.W.
Norman, J.A.T.
Roberts, D.A.
Voloshin, G.
Hess, D.M.
Lane, A.
8 more
Publication title:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-7
Pub. Year:
1994
Page(from):
253
Page(to):
263
Pages:
11
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770385 [1566770386]
Language:
English
Call no.:
E23400/941397
Type:
Conference Proceedings

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