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Non-Contact Full Wafer Evaluation of Deep Levels in Silicon Via Temperature Dependent Surface Recombination Velocity, and Carrier Lifetime

Author(s):
Publication title:
Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-3
Pub. Year:
1994
Page(from):
1
Page(to):
14
Pages:
14
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770651 [1566770653]
Language:
English
Call no.:
E23400/941395
Type:
Conference Proceedings

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